Remarkable enhancement of thermal conductivity induced by coordination transition in SiO2 thin films

被引:0
|
作者
Kong, Mingyang [1 ]
Liu, Zhichun [1 ]
Wang, Haigang [1 ]
Xu, Dezhi [1 ]
Wang, Hanbin [1 ]
Zhao, Zhipeng [1 ]
Huang, Zhengxing [2 ]
Liang, Junsheng [1 ]
机构
[1] Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China
[2] Dalian Univ Technol, Sch Control Sci & Engn, Dalian 116024, Peoples R China
关键词
REACTIVE FORCE-FIELD; MOLECULAR-DYNAMICS; SIMULATION; SILICON;
D O I
10.1007/s10853-024-10391-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The heat transfer in SiO2 is mainly dominated by phonons, but the void defects and boundary effects in the films cause strong scattering of phonons, resulting in a low thermal conductivity. Herein, we report the SiO2 thin films with prominently enhanced thermal conductivity after high-temperature annealing. Through combined experiments and non-equilibrium molecular dynamics simulation, we reveal the improvement of thermal conductivity that is originally attributed to coordination transition during the high-temperature annealing. Analysis indicates that a more ordered atom structure and denser grain boundaries could derive from the coordination transition, resulting in the crystallization of grains and defect mending. These behaviors induce a reduction of phonons scattering and increase in mean free path, which lead to nearly twofold enhance in the thermal conductivity to 2.66 Wm(-1) K-1.
引用
收藏
页码:20325 / 20334
页数:10
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