Measurement of Thermal Diffusivity of Thin Film in Thickness Direction Using an Ordinary Dielectric Film as the Sensor

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作者：
Chen, Shijie [1 ]
Zheng, Feihu [1 ]
Huang, Chenyu [1 ]
Zhang, Yewen [1 ]
机构：
[1] Department of Electrical Engineering, Tongji University, Shanghai,201804, China
来源：
IEEE Transactions on Instrumentation and Measurement | 2022年 / 71卷
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