[1] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Dept Micro Nano Elect, Shanghai 200240, Peoples R China
[2] Shanghai Jiao Tong Univ, Inst Nanomicroenergy, Zhangjiang Inst Adv Study, Shanghai 200240, Peoples R China
[3] City Univ Hong Kong, Dept Mat Sci & Engn, Hong Kong 999077, Peoples R China
[4] East China Univ Sci & Technol, Sch Mech & Power Engn, Shanghai 200237, Peoples R China
[5] Shanghai Jiao Tong Univ, Sch Mech Engn, Shanghai 200240, Peoples R China
[6] Shanghai Jiao Tong Univ, Inst Engn Thermophys, Sch Mech Engn, Shanghai 200240, Peoples R China
[7] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
[8] Harbin Engn Univ, Qingdao Innovat & Dev Ctr, Qingdao 266000, Peoples R China
[9] Henan Polytech Univ, Sch Mat Sci & Engn, Jiaozuo 454000, Peoples R China
[10] Wuhan Univ, Sch Elect Informat, Wuhan 430072, Peoples R China
[11] Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA