Optical and electrical properties of GaSe thin films prepared by PECVD

被引:0
|
作者
Kudryashov, Mikhail [1 ,2 ]
Mochalov, Leonid [1 ,2 ,3 ]
Slapovskaya, Ekaterina [2 ]
Kudryashova, Yuliya [1 ,2 ]
Fukina, Diana [2 ]
Kriukov, Ruslan [2 ]
机构
[1] Nizhny Novgorod State Technical University n.a. R.E. Alekseev, Nizhny Novgorod,603155, Russia
[2] Lobachevsky University, Nizhny Novgorod,603022, Russia
[3] University of North Carolina at Charlotte, Charlotte,28223, United States
关键词
The EDX studies were performed by the Shared Use Center New Materials and Resource-saving Technologies (Lobachevsky University);
D O I
10.1007/s11082-024-07905-3
中图分类号
学科分类号
摘要
42
引用
收藏
相关论文
共 50 条
  • [21] ELECTRICAL AND OPTICAL PROPERTIES OF ZnO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING
    Zhou, J. C.
    Li, L.
    Rong, L. Y.
    Zhao, B. X.
    Chen, Y. M.
    Li, F.
    INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2011, 25 (20): : 2741 - 2749
  • [22] Structural, optical and electrical properties of ZnO thin films prepared by reactive deposition
    Ji, ZG
    Liu, K
    Yang, CX
    Fan, RX
    Ye, ZZ
    JOURNAL OF CRYSTAL GROWTH, 2003, 253 (1-4) : 246 - 251
  • [23] Properties of thin AIN films prepared by PECVD and rapid thermal processes
    Beshkov, GD
    Georgiev, SS
    Grigorov, KG
    Maciel, HS
    Djouadi, A
    Marinov, M
    JOURNAL DE PHYSIQUE IV, 2001, 11 (PR3): : 287 - 292
  • [24] Structural, electrical and optical properties of thin ZnO films prepared by chemical precipitation
    Ciobanu, G
    Carja, G
    Apostolescu, G
    Taraboanta, I
    SUPERLATTICES AND MICROSTRUCTURES, 2006, 39 (1-4) : 328 - 333
  • [25] Optical properties of PECVD deposited DLC films prepared with air addition
    Tinchev, SS
    Dyulgerska, Y
    Nikolova, P
    Grambole, D
    Kreissig, U
    Babeva, TZ
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2006, 8 (01): : 308 - 311
  • [26] Comparison of their electrical, optical, and electrochemical properties of as-grown plasma polymerized organic thin films by PECVD
    Bae, I-S.
    Jung, C. -K.
    Jeong, S. -H.
    Cho, S. -J.
    Yu, Y. J.
    Kim, J. G.
    Boo, J. -H.
    THIN SOLID FILMS, 2006, 515 (02) : 407 - 410
  • [27] Organic and Inorganic Hybrid-Polymer Thin Films by PECVD Method and Characterization of Their Electrical and Optical Properties
    Bae, In-Seob
    Cho, Sang-Jin
    Jeong, Seong-Hun
    Cho, Hyung Jun
    Hong, Byungyou
    Boo, Jin-Hyo
    PLASMA PROCESSES AND POLYMERS, 2007, 4 : S812 - S816
  • [28] Properties of CNx films prepared by PECVD
    Cerny, F.
    Gurovie, J.
    Huttel, I.
    Suchanek, J.
    Djouadi, A.
    Hnatowicz, V.
    Diamond and Related Materials, 1999, 8 (08): : 1730 - 1731
  • [29] Properties of CNx films prepared by PECVD
    Cerny, F
    Guroviè, J
    Hüttel, I
    Suchánek, J
    Djouadi, A
    Hnatowicz, V
    DIAMOND AND RELATED MATERIALS, 1999, 8 (8-9) : 1730 - 1731
  • [30] ELECTRICAL-PROPERTIES OF A-SIOXNY-H FILMS PREPARED BY MICROWAVE PECVD
    RABILLER, P
    KLEMBERGSAPIEHA, JE
    WERTHEIMER, MR
    YELON, A
    PROCEEDINGS OF THE 3RD INTERNATIONAL CONFERENCE ON CONDUCTION AND BREAKDOWN IN SOLID DIELECTRICS, 1989, : 299 - 303