In-Situ Form Metrology of Structured Composite Surfaces Using Hybrid Structured-Light Measurement with a Novel Calibration Method

Accurately measuring the form of structured composite surfaces in situ is critical for advanced manufacturing in various engineering fields. However, challenges persist in achieving precision, miniaturization, and calibration using current structured light techniques. In this work, a hybrid structured light with compact configuration is proposed for the in-situ and embedded form metrology of structured composite surfaces. The proposed technique contains three subsystems: phase-measuring deflectometry (PMD), fringe projection profilometry (FPP), and stereo vision. The PMD subsystem accurately reconstructs the form data of specular surfaces based on the principle of structured light reflection, and the FPP subsystem measures rough surfaces by projecting structured light onto them. Output data from these subsystems are then stitched to reconstruct a complete form of the measured composite surfaces. The compact configuration is explored to reduce the system volume to improve the technique's portability and embedded measurement ability. With the stereo vision subsystem as an intermediary, a novel calibration method is applied for calculating the relations among the subsystems to improve the hybrid structured light system's calibration and data stitching accuracy between PMD and FPP subsystems. Three calibration tools are designed and manufactured for the proposed calibration technique. A portable metrology prototype based on the proposed hybrid structured light technique's principle and configuration is also developed and then calibrated using the novel calibration method. An embedded measurement experiment in a diamond turning machine demonstrates that the proposed techniques can achieve 400 nm form accuracy in specular surface measurement. A novel hybrid structured light-based technique is proposed for the in-situ and embedded form metrology of structured composite surfaces.A beam splitter (BS)-based compact configuration is used to improve the technique' portability and embedded measurement ability.A novel calibration method is applied to calculate the relations among the subsystems using the stereo vision subsystem as an intermediary.