Optical properties of hydrogenated amorphous silicon carbide films

被引:0
|
作者
机构
[1] Choi, W.K.
来源
Choi, W.K. | 2000年 / Scitec Publications Ltd., Zurich卷 / 177期
关键词
D O I
10.4028/www.scientific.net/ddf.177-178.29
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [21] Predominant influences on the bulk properties and surface morphology in hydrogenated amorphous silicon carbide films
    Ishizuka, Y
    Yamaguchi, T
    Iida, Y
    Nozaki, H
    Furukawa, A
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1996, 74 (02): : 199 - 209
  • [22] PROPERTIES OF UNDOPED AND PARA-TYPE HYDROGENATED AMORPHOUS-SILICON CARBIDE FILMS
    CHAUDHURI, P
    RAY, S
    BATABYAL, AK
    BARUA, AK
    THIN SOLID FILMS, 1984, 121 (03) : 233 - 246
  • [23] Fabrication and properties of amorphous hydrogenated boron carbide films
    A. S. Anan’ev
    O. I. Kon’kov
    V. M. Lebedev
    A. N. Novokhatski
    E. I. Terukov
    I. N. Trapeznikova
    Semiconductors, 2002, 36 : 941 - 943
  • [24] Fabrication and properties of amorphous hydrogenated boron carbide films
    Anan'ev, AS
    Kon'kov, OI
    Lebedev, VM
    Novokhatski, AN
    Terukov, EI
    Trapeznikova, IN
    SEMICONDUCTORS, 2002, 36 (08) : 941 - 943
  • [25] Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD
    Vassallo, E.
    Cremona, A.
    Ghezzi, F.
    Dellera, F.
    Laguardia, L.
    Ambrosone, G.
    Coscia, U.
    APPLIED SURFACE SCIENCE, 2006, 252 (22) : 7993 - 8000
  • [26] THICKNESS DEPENDENCE OF OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON FILMS
    SRIDHAR, R
    VENKATTASUBBIAH, R
    MAJHI, J
    RAMACHANDRAN, R
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1990, 119 (03) : 331 - 341
  • [27] Properties of hydrogenated amorphous silicon carbide films prepared by a separately excited plasma CVD method
    Tabata, A
    Kuno, Y
    Suzuoki, Y
    Mizutani, T
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1997, 30 (02) : 194 - 201
  • [28] Effect of plasma power on properties of hydrogenated amorphous silicon carbide hardmask films deposited by PECVD
    Kwon, Sungyool
    Park, Yoonsoo
    Ban, Wonjin
    Youn, Chulmin
    Lee, Sungwoo
    Yang, Jaeyoung
    Jung, Donggen
    Choi, Taekjib
    VACUUM, 2020, 174
  • [29] Comparative analysis of thin films of hydrogenated and unhydrogenated amorphous silicon carbide
    Vasin, A.V.
    Rusavskij, A.V.
    Starik, S.P.
    Kushnirenko, V.I.
    Kutsaj, A.M.
    Nazarov, A.N.
    Lysenko, V.S.
    Semenov, A.V.
    Puzikov, V.M.
    Gontar', A.G.
    Dub, S.N.
    Sverkhtverdye Materialy, 2004, (03): : 36 - 46
  • [30] High temperature annealing of hydrogenated amorphous silicon carbide thin films
    Wang, YH
    Lin, JY
    Huan, CHA
    Feng, ZC
    Chua, SJ
    THIN SOLID FILMS, 2001, 384 (02) : 173 - 176