Effects of plasticizing additives in ArF chemically amplified resists

被引：0
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作者：
Yoshino, H.
Nakata, T.
Yamana, M.
Takimoto, M.
Hashimoto, T.
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来源：
NEC Research and Development | 2001年 / 42卷 / 01期
关键词：
Resist softening temprature;
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页码：32 / 36
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