Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools with Wafer Revisiting

被引：0
|
作者：
Wu, NaiQi [1 ]
Chu, Feng [2 ]
Chu, Chengbin [3 ]
Zhou, MengChu [4 ,5 ]
机构：
[1] Department of Industrial Engineering, School of Mechatronics Engineering, Guangdong University of Technology, Guangzhou 510006, China
[2] Laboratoire Informatique, Biologie Intégrative et Systèmes Complexes EA 4526, Université d'Evry Val d'Essonne, 91020 Evry Cédex, France
[3] Laboratoire Génie Industriel, Ecole Centrale Paris, 92295 Châtenay-Malabry Cedex, France
[4] Key Laboratory of Embedded System and Service Computing, Ministry of Education, Tongji University, Shanghai 200092, China
[5] Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, NJ 07102-1982, United States
来源：
IEEE Transactions on Systems, Man, and Cybernetics: Systems | 2013年 / 43卷 / 01期
关键词：
D O I：
10.1109/tsmca.2012.2187890
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：196 / 207
相关论文
共 50 条
  • [41] Optimal Scheduling of Time-Constrained Single-arm Cluster Tools with Wafer Revisiting
    Liu, ZiCheng
    Wu, NaiQi
    Yang, FaJun
    Qiao, Yan
    2016 13TH INTERNATIONAL WORKSHOP ON DISCRETE EVENT SYSTEMS (WODES), 2016, : 355 - 360
  • [42] Cluster tools with chamber revisiting - Modeling and analysis using timed Petri nets
    Zuberek, WM
    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2004, 17 (03) : 333 - 344
  • [43] Scheduling Dual-Arm Multi-Cluster Tools With Regulation of Post-Processing Time
    Qinghua Zhu
    Bin Li
    Yan Hou
    Hongpeng Li
    Naiqi Wu
    IEEE/CAA Journal of Automatica Sinica, 2023, 10 (08) : 1730 - 1742
  • [44] Scheduling Dual-Arm Multi-Cluster Tools With Regulation of Post-Processing Time
    Zhu, Qinghua
    Li, Bin
    Hou, Yan
    Li, Hongpeng
    Wu, Naiqi
    IEEE-CAA JOURNAL OF AUTOMATICA SINICA, 2023, 10 (08) : 1730 - 1742
  • [45] An optimal scheduling technique for dual-arm Cluster Tools with Buffer modules
    Rostami, S
    Hamidzadeh, B
    2001 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN, AND CYBERNETICS, VOLS 1-5: E-SYSTEMS AND E-MAN FOR CYBERNETICS IN CYBERSPACE, 2002, : 2617 - 2622
  • [46] Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools
    Zhu, QingHua
    Zhou, MengChu
    Qiao, Yan
    Wu, Naiqi
    IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS, 2018, 48 (03): : 389 - 400
  • [47] A Novel Approach to Scheduling of Single-Arm Cluster Tools with Wafer Revisiting
    Wu, NaiQi
    Chu, Feng
    Chu, Chengbin
    Zhou, MengChu
    2009 IEEE INTERNATIONAL CONFERENCE ON AUTOMATION SCIENCE AND ENGINEERING, 2009, : 567 - +
  • [48] Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net
    Lu, Yanjun
    Qiao, Yan
    Pan, Chunrong
    Chen, Yufeng
    Wu, Naiqi
    Li, Zhiwu
    Liu, Bin
    IEEE ACCESS, 2021, 9 : 70868 - 70883
  • [49] An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints
    Rostami, S
    Hamidzadeh, B
    Camporese, D
    IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION, 2001, 17 (05): : 609 - 618
  • [50] An optimal scheduling technique for dual-arm robots in cluster tools with residency constraints
    Rostami, S
    Hamidzadeh, B
    Camporese, D
    PROCEEDINGS OF THE 39TH IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-5, 2000, : 3459 - 3464
12345