Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools with Wafer Revisiting

被引：0
|
作者：
Wu, NaiQi [1 ]
Chu, Feng [2 ]
Chu, Chengbin [3 ]
Zhou, MengChu [4 ,5 ]
机构：
[1] Department of Industrial Engineering, School of Mechatronics Engineering, Guangdong University of Technology, Guangzhou 510006, China
[2] Laboratoire Informatique, Biologie Intégrative et Systèmes Complexes EA 4526, Université d'Evry Val d'Essonne, 91020 Evry Cédex, France
[3] Laboratoire Génie Industriel, Ecole Centrale Paris, 92295 Châtenay-Malabry Cedex, France
[4] Key Laboratory of Embedded System and Service Computing, Ministry of Education, Tongji University, Shanghai 200092, China
[5] Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, NJ 07102-1982, United States
来源：
IEEE Transactions on Systems, Man, and Cybernetics: Systems | 2013年 / 43卷 / 01期
关键词：
D O I：
10.1109/tsmca.2012.2187890
中图分类号：
学科分类号：
摘要：
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页码：196 / 207
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