Fabrication of TiN and TiCN coatings by microwave irradiation

被引：0
|
作者：
Miyashita K. [1 ]
Hayashi Y. [1 ]
Takizawa H. [1 ]
机构：
[1] Graduate School of Engineering, Tohoku University, Aoba-ku, Sendai 980-8579, 6-6-07 Aramaki, Aza-aoba
来源：
Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy | 2010年 / 57卷 / 12期
关键词：
Ceramics coating; Hardness; Microwave processing; TiCN; TiN;
D O I：
10.2497/jjspm.57.753
中图分类号：
学科分类号：
摘要：
TiN coating was successfully formed by burying a quartz glass substrate into Ti powder and subsequent microwave irradiation in air. The temperature of the powder rapidly rose up to 1100°C by microwave irradiation, and TiN coating was formed on the substrate by vapor phase reaction. Particle size, film thickness, and Vicker's hardness of the coating increased with increasing the irradiation time and microwave power. Similar technique was also applied to form TiCN coating by using mixture of Ti and carbon powder instead of Ti powder. It was revealed that the carbon content, film thickness, and Vicker's hardness of the coating increased with increasing the carbon content in the starting powder.
引用
收藏
页码：753 / 757
页数：4
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