Displays, sensors, and MEMS -MEMS actuators and resonators

被引：0
|
作者：
Van Beek, Joost [1 ]
Ikeda, Koichi [2 ]
机构：
[1] NXP Semiconductors
[2] Sony Corporation
来源：
Technical Digest - International Electron Devices Meeting, IEDM | 2008年
关键词：
D O I：
10.1109/IEDM.2008.4796778
中图分类号：
学科分类号：
摘要：
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