Study on pulsed laser hetero-epitaxial growth and properties of Pb(Zr0.52Ti0.48)O3 film

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作者：
Liu, Yu [1 ,2 ]
Cheng, Xiu-Lan [1 ]
Xie, Si-Qiang [3 ]
机构：
[1] School of Microelectronics, Shanghai Jiaotong University, Shanghai 200030, China
[2] Semiconductor Manufacture International Corporation (Shanghai) FAB3, Shanghai 201203, China
[3] School of Electronic Eng., University of Electronic Science and Technology of China, Chengdu 610054, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 2007年 / 38卷 / 05期
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页码：734 / 736
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