Deposition of MSe (M = Cd, Zn) films by LP-MOCVD from novel single-source precursors M[(SePPh2)2N]2

被引：0
|
作者：
Afzaal, Mohammad [1 ]
Aucott, Stephen M. [1 ]
Crouch, David [1 ]
O'Brien, Paul [1 ]
Woollins, J. Derek [1 ]
Park, Jin-Ho [1 ]
机构：
[1] Manchester Materials Science Ctr., Department of Chemistry, University of Manchester, Oxford Road, Manchester, M13 9PL, United Kingdom
来源：
Advanced Materials | 2002年 / 14卷 / 17期
关键词：
Glass - Polycrystalline materials - Scanning electron microscopy - Semiconducting cadmium compounds - Semiconducting zinc compounds - Stoichiometry - Thermogravimetric analysis - Thin films - X ray powder diffraction;
D O I：
10.1002/1521-4095(20020205)14:33.0.CO;2-O
中图分类号：
学科分类号：
摘要：
Communication: CdSe and ZnSe films have been deposited from novel single-source precursors M[(SePPh2)2N]2 (M = Cd or Zn) by LP-MOCVD. The precursors are air stable and start to evaporate at 375 °C. The CdSe and ZnSe films deposited on glass are polycrystalline and of hexagonal phase. Scanning electron microscopy reveals dense films (see Figure) and energy dispersive X-ray analysis indicates that the stoichiometry of the deposited films is close to 1:1.
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页码：187 / 189
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