Effect of pH slurries on chemical mechanical polishing for magnesia-alumina spinel

被引：0
|
作者：
School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo [1 ]
454003, China
不详 [2 ]
453003, China
不详 [3 ]
100013, China
机构：
来源：
Hongwai yu Jiguang Gongcheng Infrared Laser Eng. | 1600年
关键词：
Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Alkaline slurry - Chemical mechanical polishing(CMP) - Magnesia alumina spinels - Material removal rate - pH value - Polishing slurries - Rotational speed - Ultraprecision machining
引用
收藏
相关论文
共 50 条
  • [1] Effect of different abrasives on chemical mechanical polishing for magnesia alumina spinel
    Wang Z.
    Pang M.
    Su J.
    Yao J.
    Key Engineering Materials, 2020, 866 : 115 - 124
  • [2] ADDITION OF ALUMINA AS EXCESS TO A MAGNESIA-ALUMINA SPINEL BODY
    SHAH, NR
    HALL, WB
    AMERICAN CERAMIC SOCIETY BULLETIN, 1971, 50 (04): : 444 - &
  • [3] Relaxation of Nucleation Structure in Magnesia-Alumina Spinel
    Brazhnik, D. A.
    Semchenko, G. D.
    METALLOFIZIKA I NOVEISHIE TEKHNOLOGII, 2010, 32 (02): : 203 - 208
  • [4] Carbon coating and reaction on magnesia-alumina spinel
    Mazzoni, A. D.
    Sainz, M. A.
    Aglietti, E. F.
    Caballero, A.
    MATERIALS CHEMISTRY AND PHYSICS, 2007, 101 (01) : 211 - 216
  • [5] Effect of magnesia-alumina spinel precursor sol on the sintering property of fused magnesia refractory
    Hou, Qingdong
    Luo, Xudong
    Xie, Zhipeng
    An, Di
    Zhang, Xiaofang
    Peng, Zijun
    CERAMICS INTERNATIONAL, 2019, 45 (03) : 3459 - 3464
  • [6] Microwaves as an energy source for producing magnesia-alumina spinel
    Aguilar, JA
    Gonzalez, M
    Gomez, I
    JOURNAL OF MICROWAVE POWER AND ELECTROMAGNETIC ENERGY, 1997, 32 (02) : 74 - 79
  • [7] Study of commercial magnesia-alumina spinels for alumina-spinel castables
    Chan, C.F.
    Ko, Yung-Chau
    InterCeram: International Ceramic Review, 1998, 47 (06): : 374 - 378
  • [8] Effect of solid solution of magnesia-alumina spinel on the microstructure and mechanical properties of CAC-bonded corundum castables
    Zhao, Yaning
    Zhang, Zhongzhuang
    Hou, Qiqi
    Zeng, Jinyan
    Mu, Yuandong
    He, Jian
    Ye, Guotian
    Tian, Jiajia
    CERAMICS INTERNATIONAL, 2025, 51 (08) : 9791 - 9799
  • [9] PHYSICO CHEMICAL PROPERTIES AND STRUCTURE OF MAGNESIA-ALUMINA
    MIYATA, S
    KUMURA, T
    HATTORI, H
    TANABE, K
    NIPPON KAGAKU ZASSHI, 1971, 92 (06): : 514 - &
  • [10] Effect of alumina sol on the preparation of magnesia-alumina spinel foam ceramics by foaming-sol method
    Sun, Gege
    Li, Guohua
    Jiao, Changfa
    Tian, Lin
    Deng, Shudan
    INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY, 2024, 21 (06) : 4073 - 4080
12345