A new deformable mirror for adaptive optics

被引：0
|
作者：
Rousier, R. [1 ]
Divoux, C. [1 ]
Grange, H. [1 ]
Charton, J. [2 ]
Vaudaine, M.H. [1 ]
Jocou, L. [2 ]
Raphoz, N. [3 ]
Trzmiel, M. [3 ]
Pisella, C. [3 ]
Chappaz, C. [1 ]
机构：
[1] CEA/DRT, LETI/DIHS, 17 Avenue des Martyrs, 38054 Grenoble Cedex 09, France
[2] Laboratoire d'Astrophysique de l'Observatoire de Grenoble, 414 R. de la Piscine, Domn. Univ., 38041 Saint-Martin d'Hères, France
[3] Tronics Microsystems, 55 rue du Pré de l'Horme, 38926 Crolles Cedex, France
来源：
Proc SPIE Int Soc Opt Eng |
关键词：
Compendex;
D O I：
61140K
中图分类号：
学科分类号：
摘要：
Actuators - Adaptive optics - Electric potential - Electrostatics - Finite element method - Optical properties - Performance - Reflective coatings - Silicon - Surface roughness
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