Research on Reflective Polarization Phase-Shifting Dynamic Point Diffraction Interferometry

被引：0
|
作者：
Wang C. [1 ,2 ]
Zhou Y. [1 ]
Lu Q. [1 ]
Xu T. [1 ]
Liu S. [1 ]
机构：
[1] Precision Optical Manufacturing and Testing Center, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai
[2] Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2020年 / 47卷 / 10期
关键词：
Interferometry; Measurement and metrology; Point diffraction interferometer; Polarization phase-shifting; Spherical surface;
D O I：
10.3788/CJL202047.1004003
中图分类号：
学科分类号：
摘要：
In order to suppress the measurement error caused by environmental vibration and realize the dynamic detection of spherical optical elements, a reflective point diffraction interference system based on micro polarizer array is proposed in this work. The interference system uses a short coherent laser source to obtain two coherent beams. The contrast of interference fringes is adjusted by adjusting the light intensity ratio of two polarized beams. Four phase-shifting interferograms are obtained by a single frame image collected by a CCD camera with integrated micro polarizer array to realize dynamic detection. The measurement results of the same concave mirror sample with the interference system and ZYGO interferometer are consistent, which verifies the accuracy of the measurement results of the interference system. On the experimental measurement platform, the vibration condition of the motor is added, and the results show that when the vibration velocity is less than 16 μm/s, more accurate surface shape measurement results can be obtained, which indicates that the anti-vibration performance of the interference system is good. © 2020, Chinese Lasers Press. All right reserved.
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