Vector sensor for scanning SQUID microscopy

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[1] [1,Dang, Vu The
[2] Toji, Masaki
[3] 1,Thanh Huy, Ho
[4] Miyajima, Shigeyuki
[5] 1,Shishido, Hiroaki
[6] Hidaka, Mutsuo
[7] Hayashi, Masahiko
[8] 1,Ishida, Takekazu
来源：
Dang, Vu The (vu-dang@pe.osakafu-u.ac.jp) | 1600年 / IOP Publishing Ltd卷 / 871期
关键词：
We plan to build a novel 3-dimensional (3D) scanning SQUID microscope with high sensitivity and high spatial resolution. In the system; a vector sensor consists of three SQUID sensors and three pick-up coils realized on a single chip. Three pick-up coils are configured in orthogonal with each other to measure the magnetic field vector of X; Y; Z components. We fabricated some SQUID chips with one uniaxial pick-up coil or three vector pick-up coils and carried out fundamental measurements to reveal the basic characteristics. Josephson junctions (J[!text type='Js']Js[!/text]) of sensors are designed to have the critical current density Jc of 320 A/cm2; and the critical current Ic becomes 12.5 μA for the 2.2μm × 2.2μm JJ. We carefully positioned the three pickup coils so as to keep them at the same height at the centers of all three X; Y and Z coils. This can be done by arranging them along single line parallel to a sample surface. With the aid of multilayer technology of Nb-based fabrication; we attempted to reduce an inner diameter of the pickup coils to enhance both sensitivity and spatial resolution. The method for improving a spatial resolution of a local magnetic field image is to employ an XYZ piezo-driven scanner for controlling the positions of the pick-up coils. The fundamental characteristics of our SQUID sensors confirmed the proper operation of our SQUID sensors and found a good agreement with our design parameters. © Published under licence by IOP Publishing Ltd;
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