Properties of Nb2O5 films deposited by DC reactive sputtering

被引：0
|
作者：
Huang, Yinsong [1 ]
Zhang, Yuzhi [1 ]
Hu, Xingfang [1 ]
机构：
[1] R and D Cent. of Special Inorg. Mat., Shanghai Inst. of Ceramics, Chinese Acad. of Sci., Shanghai 200050, China
来源：
Cailiao Yanjiu Xuebao/Chinese Journal of Materials Research | 2002年 / 16卷 / 05期
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摘要：
26
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页码：517 / 522
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