共 50 条
- [41] Generation of debris in the femtosecond laser machining of a silicon substrate Applied Physics A, 2005, 81 : 1393 - 1398
- [44] Laser Assisted Machining Process of HIPed Silicon Nitride JOURNAL OF LASER MICRO NANOENGINEERING, 2009, 4 (03): : 207 - 211
- [45] Generation of debris in the femtosecond laser machining of a silicon substrate APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 81 (07): : 1393 - 1398
- [46] Semicon West - Technology development efforts are still climbing LASER FOCUS WORLD, 2001, 37 (09): : 38 - 39
- [48] SEMICONDUCTOR MANUFACTURING TECHNOLOGY AT SEMICON-WEST 1990 WERKSTATTSTECHNIK ZEITSCHRIFT FUR INDUSTRIELLE FERTIGUNG, 1990, 80 (09): : 474 - 474