Measurement technique for incident secondary electron current in secondary electron detectors

被引：0
|
作者：
Agemura, Toshihide [1 ]
Fukuhara, Satoru [1 ]
Todokoro, Hideo [1 ]
机构：
[1] Hitachi, Ltd, Ibaraki, Japan
来源：
Scanning | 2000年 / 22卷 / 02期
关键词：
Picoammeter - Secondary electron current - Secondary electron detectors;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：127 / 128
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