Study of critical dimensions of printable phase defects using an extreme ultraviolet microscope

被引：0
|
作者：
Kamaji, Yoshito [1 ,3 ]
Takase, Kei [1 ,3 ]
Yoshizumi, Takahiro [1 ,3 ]
Sugiyama, Takashi [2 ]
Uno, Toshiyuki [2 ]
Watanabe, Takeo [1 ,3 ]
Kinoshita, Hiroo [1 ,3 ]
机构：
[1] Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
[2] Asahi Glass Co., Ltd., R and D Center, Yokohama 221-8755, Japan
[3] JST, CREST, Yonbancho, Chiyoda Tokyo 102-0081, Japan
来源：
Japanese Journal of Applied Physics | 2009年 / 48卷 / 6 PART 2期
关键词：
Compendex;
D O I：
10.1143/jjap.48.06fa07
中图分类号：
学科分类号：
摘要：
Defects
引用
收藏
页码：071 / 06
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