Utilization of Extrinsic Fabry-Perot Interferometers with Spectral Interferometric Interrogation for Microdisplacement Measurement

The paper presents a number of signal processing approaches for the spectral interferometric interrogation of extrinsic Fabry-Perot interferometers (EFPIs). The analysis of attainable microdisplacement resolution is performed and the analytical equations describing the dependence of resolution on parameters of the interrogation setup are derived. The efficiency of the proposed signal processing approaches and the validity of analytical derivations are supported by experiments. The proposed approaches allow the interrogation of up to four multiplexed sensors with attained resolution between 30 pm and 80 pm, up to three times improvement of microdisplacement resolution of a single sensor by means of using the reference interferometer and noisecompensating approach, and ability to register signals with frequencies up to 1 kHz in the case of 1 Hz spectrum acquisition rate. The proposed approaches can be used for various applications, including biomedical, industrial inspection, and others, amongst the microdisplacement measurement. © 2020