Active disturbance rejection control design for fast AFM

Active disturbance rejection control (ADRC) as an alternative to classical PID control to solving control problems, has gained significant traction these years. With its simple tuning method, robustness against process parameter variations and ability of disturbance rejection, we tried it in our homemade fast atomic force microscope (AFM). Experiments are carried out in contact mode on standard optical grating sample with 50Hz line rate. The results show that ADRC can reject external disturbances well, and can reduce system vibrations obviously. © (2015) Trans Tech Publications, Switzerland.