Active disturbance rejection control design for fast AFM

被引：1

作者：

Chen, Daixie ^{[1
]}

Yin, Bohua ^{[1
]}

Liu, Junbiao ^{[1
]}

Li, Wenping ^{[2
]}

Wu, Liqiang ^{[2
]}

Li, Han ^{[1
]}

机构：

[1] Department of Micro-Nano Fabrication Technology, Institute of Electrical Engineering, Chinese Academy of Scineces, Beijing,100190, China

[2] Beijing University of Aeronautics and Astronautics, Beijing,100191, China

来源：

Key Engineering Materials | 2015年 / 645卷

关键词：

D O I：

10.4028/www.scientific.net/KEM.645-646.670

中图分类号：

学科分类号：

摘要：

Active disturbance rejection control (ADRC) as an alternative to classical PID control to solving control problems, has gained significant traction these years. With its simple tuning method, robustness against process parameter variations and ability of disturbance rejection, we tried it in our homemade fast atomic force microscope (AFM). Experiments are carried out in contact mode on standard optical grating sample with 50Hz line rate. The results show that ADRC can reject external disturbances well, and can reduce system vibrations obviously. © (2015) Trans Tech Publications, Switzerland.

引用

页码：670 / 674

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