High-linearity MEMS accelerometer with lateral comb finger groups

被引：0
|
作者：
Xiong, Xingguo [1 ]
Li, Huanyu [1 ]
机构：
[1] University of Bridgeport, Bridgeport,CT,06604, United States
来源：
Lecture Notes in Electrical Engineering | 2015年 / 312卷
关键词：
D O I：
10.1007/978-3-319-06764-3_76
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：589 / 597
相关论文
共 50 条
  • [21] A High-Linearity Closed-Loop Capacitive Micro-Accelerometer Based on Ring-Diode Capacitance Detection
    Tao, Qi
    Tang, Bin
    SENSORS, 2023, 23 (03)
  • [22] High-Power and High-Linearity Photodiodes at 1064 nm
    Peng, Yiwei
    Sun, Keye
    Shen, Yang
    Beling, Andreas
    Campbell, Joe C.
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2020, 38 (17) : 4850 - 4856
  • [23] High-Power, High-Linearity Photodiodes for RF Photonics
    Campbell, J. C.
    Beling, A.
    Piels, Molly
    Fu, Yang
    Cross, Allen
    Zhou, Qiugui
    Peters, Jon
    Bowers, John E.
    Li, Zhi
    2012 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES (COMMAD 2012), 2012, : 215 - +
  • [24] High-Linearity Bi-SQUID: Design Map
    Kornev, Victor K.
    Kolotinskiy, Nikolay, V
    Bazulin, Daniil E.
    Mukhanov, Oleg A.
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2018, 28 (07)
  • [25] Phase Characterization of Intermodulation Distortion in High-Linearity Photodiodes
    Fu, Yang
    Pan, Huapu
    Beling, Andreas
    Campbell, Joe
    2012 INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS (IPRM), 2013, : 219 - 220
  • [26] Design of High-Linearity Amplifier for Wireless LAN Transceiver
    Nizhnik, O.
    Pokharel, R. K.
    Kanaya, H.
    Yoshida, K.
    2007 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5, 2007, : 120 - 123
  • [27] High-Linearity Reconfigurable Microstrip UWB Bandpass Filters
    Rabbi, K.
    Athukorala, L.
    Panagamuwa, C. J.
    Vardaxoglou, J. C.
    Budimir, D.
    2011 6TH EUROPEAN MICROWAVE INTEGRATED CIRCUIT CONFERENCE, 2011, : 172 - 175
  • [28] High-Linearity Uni-Traveling-Carrier Photodiodes
    Pan, Huapu
    Beling, Andreas
    Campbell, Joe C.
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2009, 21 (24) : 1855 - 1857
  • [29] Sensitivity deviation probability model of close loop micro-accelerometer based on comb finger gaps' MEMS Process error
    Dai Q.
    Qi Y.
    Zhiyong Z.
    Wei Z.
    Huaiwu Z.
    Micro and Nanosystems, 2010, 2 (01) : 43 - 48
  • [30] A novel CMOS MEMS accelerometer with four sensing finger arrays
    Sun, Chih-Mimg
    Wang, Chuan-Wei
    Liu, Dong Hang
    Lu, Michael S. -C.
    Fang, Weileun
    2006 IEEE SENSORS, VOLS 1-3, 2006, : 1119 - +
12345