Study on noise suppression technology for high-speed deflection subsystem

被引:0
|
作者
Yao, Zuo-Bin [1 ]
Zhang, Yu-Lin [1 ]
Wei, Shou-Shui [1 ]
机构
[1] Institute of Electronbeam, Shandong University, Jinan 250061, China
来源
Weixi Jiagong Jishu/Microfabrication Technology | 2008年 / 02期
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页码:5 / 7
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