Integrated RF-MEMS technology for reconfigurable RF transceivers

被引：0
|
作者：
Kuwabara, Kei [1 ]
Sato, Norio [2 ]
Shimamura, Toshishige [2 ]
Morimura, Hiroki [2 ]
Kodate, Junichi [3 ]
Ishii, Hiromu [2 ]
机构：
[1] NTT Microsystem Integration Laboratories, Atsugi-shi, 243-0198, Japan
[2] Smart Devices Laboratory, NTT Microsystem Integration Laboratories
[3] MEMS Devices Research Group, Smart Devices Laboratory, NTT Microsystem Integration Laboratories
来源：
NTT Technical Review | 2007年 / 5卷 / 10期
关键词：
Electromechanical devices - MEMS - Space optics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper describes a novel structure and fabrication process for integrated RF-MEMS (radio frequency microelectromechanical systems) technology. This technology features a multilayer structure and an encapsulation process for the integration and protection of RF MEMS devices. Various types of encapsulated RF-MEMS devices, such as switches and varactors, were fabricated on the same substrate simultaneously. Experimental results indicate that this technology is promising for the development of small low-power reconfigurable RF transceivers.
引用
收藏
相关论文
共 50 条
  • [31] RF-MEMS technology platform for agile mobile and satellite communications
    Rottenberg, X.
    Soussan, P.
    Stoukatch, S.
    Czarnecki, P.
    Nauwelaers, B.
    Carchon, G.
    De Wolf, I.
    De Raedt, W.
    Tilmans, H. A. C.
    2006 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-4, 2006, : 1688 - +
  • [32] Wideband bandpass filter design based on rf-mems technology
    Sifat S.M.
    Savaj R.
    Stiharu I.
    Kishk A.
    International Journal of Mechatronics and Applied Mechanics, 2020, 1 (07): : 70 - 74
  • [33] RF-powero: driver for electrostatic RF-MEMS devices
    Rottenberg, X
    Brabels, S
    De Raedt, W
    Nauwelaers, B
    Tilmans, HAC
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (09) : S43 - S48
  • [34] RF-MEMS Reconfigurable Filters on Low Loss Substrates for Flexible Front Ends
    Blondy, P.
    Palego, C.
    Houssini, M.
    Pothier, A.
    Crunteanu, A.
    Lim, X.
    2007 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5, 2007, : 1860 - 1862
  • [35] Reconfigurable matching with a 10-30 GHz distributed RF-MEMS tuner
    Shen, Qin
    Barker, N. Scott
    2005 ASIA-PACIFIC MICROWAVE CONFERENCE PROCEEDINGS, VOLS 1-5, 2005, : 2168 - 2171
  • [36] A New Concept of Reconfigurable Antenna Structure Based on an Array of RF-MEMS Switches
    Donelli, Massimo
    Iannacci, Jacopo
    Manekiya, Mohammedhusen
    Applied Sciences (Switzerland), 2024, 14 (23):
  • [37] Tuning antennas with EFFA RF-MEMS
    Guy A. E. Vandenbosch
    Vladimir Volski
    Alexander Vasylchenko
    Walter De Raedt
    Xavier Rottenberg
    International Journal of System Assurance Engineering and Management, 2023, 14 : 690 - 698
  • [38] Design of reconfigurable fractal antennas and RF-MEMS for space-based systems
    Vinoy, KJ
    Varadan, VK
    SMART MATERIALS AND STRUCTURES, 2001, 10 (06) : 1211 - 1223
  • [39] EPCOS acquires RF-MEMS business
    不详
    MICROWAVE JOURNAL, 2008, 51 (06) : 51 - 51
  • [40] Broadband RF-MEMS based SPDT
    DiNardo, Sergio
    Farinelli, Paola
    Giacomozzi, Flavio
    Mannocchi, Giovanni
    Marcelli, Romolo
    Margesin, Benno
    Mezzanotte, Paolo
    Mulloni, Viviana
    Russer, Peter
    Sorrentino, Roberto
    Vitulli, Francesco
    Vietzorreck, Larissa
    2006 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-4, 2006, : 1178 - +
12345