Fabrication of bulk ceramics by high-power millimeter-wave radiation

被引:0
|
作者
Makino, Y. [1 ]
Ueno, T. [1 ]
Matsumoto, T. [1 ]
Miyake, S. [1 ]
机构
[1] Joining and Welding Res. Institute, Osaka University, 11-10 Mihogaoka, Ibaraki, Osaka 567-0047, Japan
关键词
Densification - Millimeter wave devices - Sintering - Thermal effects;
D O I
10.1143/jjap.40.1080
中图分类号
学科分类号
摘要
High-power 28 GHz millimeter-wave radiation was applied to the fabrication of bulk AlN, Si3N4 and Al2O3. Millimeter-wave radiation enables the rapid sintering of these ceramics at a temperature from 50°C to 300°C lower than that of the conventional method. The rapid sintering is attributed to the enhancement of atomic migration due to the nonthermal effect of the millimeter wave. It is indicated that millimeter wave radiation can be used for the efficient fabrication of bulk ceramics.
引用
收藏
页码:1080 / 1082
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