Fabrication and developments of nano-gap electrode using self-assembled molecular lithography

被引:0
|
作者
Nishino, Takayuki [1 ,2 ,4 ]
Negishi, Ryota [3 ]
Ishibashi, Koji [1 ,2 ]
机构
[1] Advanced Device Laboratory, RIKEN Advanced Science Institute, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
[2] Graduate school of advanced Integration Science, Chiba University, Chiba 263-8522, Japan
[3] Department of Applied Physics, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
[4] Planning and Development Section, Sanwa. Co., 362-1 Iiduka, Kumagaya, Saitama 360-0231, Japan
关键词
Electrodes - Contacts (fluid mechanics) - Nanoparticles - Fabrication;
D O I
10.3131/jvsj2.55.333
中图分类号
学科分类号
摘要
Recently, the research of low dimensional nano-structure with nanogap electrode has been intensively studied. In this paper, we describe the fabrication of nanogap electrodes using self-assemble lithography which has advantages of high precision, high yields, and high productivity on the fabrication. Next, single electron transistors (SETs), which consist of Nb nanogap electrode, single molecule of p-xylylenediamine, and Au nano-particle, are shown. Especially, the demonstration of these SETs is attributed to the good connection between Nb nanogap and p-xylylenediamine. Therefore, we introduce the analysis of nano-contacts between nanogap electrode and nano-materials.
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页码:333 / 340
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