Deposition technology and properties of chromium oxide coatings by RF reactive sputtering

被引：0
|
作者：
Xiong, Xiaotao [1 ]
Yan, Liangchen [1 ]
Yang, Huisheng [1 ]
Wang, Yanbin [1 ]
机构：
[1] Dept. of Mat. Phys. and Chem., Univ. of Sci. and Technol. Beijing, Beijing 100083, China
来源：
Beijing Keji Daxue Xuebao/Journal of University of Science and Technology Beijing | 2005年 / 27卷 / 02期
关键词：
Chromium compounds;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：205 / 208
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