共 14 条
- [11] Tenjimbayashi K., Straightness measurement of a moving table using laser beams and quadrant PSDs, SPIE, 4669, pp. 227-231, (2002)
- [12] Tenjimbayashi K., Straightness measurement of a moving table by using laser beams, SPIE, 4093, pp. 47-57, (2000)
- [13] Yan Y., He J., Cang Y., Et al., Effect of pentaprism error on parallelism detection, J. Applied Optics, 28, 5, pp. 649-653, (2007)
- [14] Su P., Yu Y., Zhu Q., Et al., A self referenced Hartmann testing-radial slope testing, SPIE, 4926, pp. 140-145, (2002)