Progress and perspective of optical MEMS packaging technology

被引：0
|
作者：
Sawada R. [1 ]
Nogami H. [2 ]
Higurashi E. [3 ]
机构：
[1] Kyushu University, 744 Motooka, Nishi-ku, Fukuoka
[2] University of Tokyo, 7-3-1, Hongo, Bunkyou-ku, Tokyo
[3] National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1, Namiki, Tsukuba, Ibaraki
来源：
| 2018年 / Japan Institute of Electronics Packaging卷 / 21期
关键词：
D O I：
10.5104/jiep.21.558
中图分类号：
学科分类号：
摘要：
[No abstract available]
引用
收藏
页码：558 / 566
页数：8
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