Accurate roughness measurement using a method for evaluation and interpolation of the validity of height data from a scanning white-light interferometer

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作者：
机构：
[1] Kim, Namyoon
[2] Lee, Seung Woo
[3] Yongjun, I.
[4] Pahk, Heui-Jae
来源：
Pahk, Heui-Jae (hjpahk@snu.ac.kr) | 2017年 / Optical Society of Korea卷 / 01期
关键词：
Number:; -; Acronym:; SNU; Sponsor: Seoul National University; IOER; Sponsor: Institute of Engineering Research; Seoul National University;
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摘要：
Interferometry
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