The wafers thermostabilization process automation in process of photolithography on a basis of modular plant with carrying gas interlayer

被引：0
|
作者：
机构：
来源：
| 2001年 / Mashinostroeni卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Automation of the process of equalization of concentration and flow rate for plant wastewaters
    Malkin, VP
    Kuzin, VI
    CHEMICAL AND PETROLEUM ENGINEERING, 1999, 35 (9-10) : 645 - 647
  • [22] Novel subsea gas dehydration process, the process plant and dehydration performance
    Parks, David
    Amin, Robert
    JOURNAL OF PETROLEUM SCIENCE AND ENGINEERING, 2012, 81 : 94 - 99
  • [23] Extended workflow for intention-based engineering and automation of modular process plants
    Markaj, Artan
    Schoch, Nicolai
    Stark, Katharina
    Hoernicke, Mario
    Fay, Alexander
    AT-AUTOMATISIERUNGSTECHNIK, 2023, 71 (01) : 27 - 43
  • [24] Analysis of service-oriented architecture approaches suitable for modular process automation
    Bloch, Henry
    Fay, Alexander
    Hoernicke, Mario
    2016 IEEE 21ST INTERNATIONAL CONFERENCE ON EMERGING TECHNOLOGIES AND FACTORY AUTOMATION (ETFA), 2016,
  • [25] EAF process optimization through a modular automation system and an adaptive control strategy
    Piazza, M.
    Bianco, F.
    Patrizio, D.
    Ometto, M.
    METALLURGIA ITALIANA, 2016, (09): : 21 - 30
  • [26] Automation architecture and engineering for modular process plants - approach and industrial pilot application
    Hoernicke, Mario
    Stark, Katharina
    Wittenbrink, Alexander
    Bloch, Henry
    Hensel, Stephan
    Menschner, Anna
    Fay, Alexander
    Knohl, Torsten
    Urbas, Leon
    IFAC PAPERSONLINE, 2020, 53 (02): : 8255 - 8260
  • [27] Efficient Automation Engineering of Modular Process Equipment Assemblies Using the Digital Twin
    Rahm, Julian
    Theissen, Manfred
    Klose, Anselm
    Soemers, Marcus
    Temmen, Heiner
    Schaefer, Christian
    Urbas, Leon
    CHEMIE INGENIEUR TECHNIK, 2021, 93 (12) : 2081 - 2091
  • [28] Photoresist for Water-developable Photolithography Process Using Plant-derived Hemicellulose
    Hachikubo, Yuna
    Miura, Sayaka
    Yamagishi, Rio
    Ando, Mano
    Takei, Satoshi
    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2024, 37 (04) : 363 - 370
  • [29] Integrating Plant and Process Information as a Basis for Automated Plant Diagnosis Tasks
    Arroyo, Esteban
    Fay, Alexander
    Chioua, Moncef
    Hoernicke, Mario
    2014 IEEE EMERGING TECHNOLOGY AND FACTORY AUTOMATION (ETFA), 2014,
  • [30] AUTOMATION OF GAS TUNGSTEN-ARC SPOT WELDING PROCESS
    VILKAS, EP
    WELDING JOURNAL, 1966, 45 (01) : 30 - &
12345