Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range

被引：2
|
作者：
Ansari H.R. [1 ]
Kordrostami Z. [1 ]
机构：
[1] Department of Electrical and Electronics Engineering, Shiraz University of Technology, Shiraz
来源：
Energy Harvesting and Systems | 2021年 / 8卷 / 02期
关键词：
capacitive sensor; diaphragm; MEMS pressure sensor; MIM; sensitivity;
D O I：
10.1515/ehs-2021-0017
中图分类号：
学科分类号：
摘要：
In this paper, the improvement of the sensitivity of a capacitive MEMS pressure sensor is investigated. The proposed spring for the sensor can increase the sensitivity. Silicon is used as the substrate and gold and aluminium nitrate are used as the diaphragm and the dielectric layer, respectively. The dimensions of the diaphragm are 150 μm × 150 μm, which is suspended by four springs. The air gap between the diaphragm and the top electrode is 1.5 μm. The proposed structure is an efficient sensor for the pressures in the range of 1-20 kPa. By using the proposed design, the sensitivity of the MEMS sensor in 18 kPa has improved to 663 (× 10-3 pF/kPa). © 2021 Walter de Gruyter GmbH, Berlin/Boston.
引用
收藏
页码：81 / 85
页数：4
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