Fabrication of Uniform ZrC Coating by Low Pressure Chemical Vapor Deposition: The in-situ Bromination Method

被引：0
|
作者：
Ma, Xin [1 ]
Hu, Haifeng [2 ]
Qiu, Haipeng [1 ]
机构：
[1] National Key Laboratory of Advanced Composites, AVIC Composite Technology Center, Beijing,101300, China
[2] Science and Technology on Advanced Ceramic Fibers and Composites Laboratory, National University of Defense Technology, Changsha,410073, China
来源：
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2018年 / 47卷
基金：
中国国家自然科学基金;
关键词：
Surface reactions - Growth kinetics - Morphology - Bromine compounds - Zirconium compounds - Carbides - Reaction kinetics - Diffusion coatings;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Bromination apparatus was designed and manufactured to accurately control the flow rate of ZrBr4 vapor. Zirconium carbide (ZrC) coatings were deposited on graphite substrate at 1200℃ by low pressure chemical vapor deposition from the Zr-Br2-C3H6-H2-Ar system. The effects of gas composition (input C/Zr ratio) on the morphology and growth mechanism of ZrC coatings were investigated. The results show that the coating deposition process is controlled by the surface reaction kinetics at the input C/Zr ratio of 1.5, leading to a loose structure. When the input C/Zr ratios are 0.5 and 1, coating growth is dominated by diffusion kinetics, resulting in (200) preferential orientation with a dense columnar structure. Meanwhile, ZrC coating without free carbon is produced at the input C/Zr ratio of 0.5. Copyright © 2018, Northwest Institute for Nonferrous Metal Research. Published by Elsevier BV. All rights reserved.
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页码：58 / 61
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