Thermally stable and low resistance Ru ohmic contacts to n-ZnO

被引：0
|
作者：
Kim, Han-Ki [1 ]
Kim, Kyoung-Kook [1 ]
Park, Seong-Ju [1 ]
Seong, Tae-Yeon [2 ]
Yoon, Young Soo [1 ]
机构：
[1] Department of Materials Science and Engineering, Kwangju Institute of Science and Technology (K-JIST), Kwangju 500-712, Korea, Republic of
[2] Thin Film Technology Research Center, Korea Institute of Science and Technology (KIST), P.O. Box 131, Cheongryang, Seoul 130-650, Korea, Republic of
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2002年 / 41卷 / 5 B期
关键词：
D O I：
10.1143/jjap.41.l546
中图分类号：
学科分类号：
摘要：
Zinc oxide
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