Gold-free fully Cu-metallized InGaP/GaAs heterojunction bipolar transistor

被引：0
|
作者：
Chang, Shang-Wen [1 ]
Chang, Edward Yi [1 ]
Biswas, Dhrubes [1 ]
Lee, Cheng-Shih [1 ]
Chen, Ke-Shian [1 ]
Tseng, Chao-Wei [1 ]
Hsieh, Tung-Ling [1 ]
Wu, Wei-Cheng [1 ]
机构：
[1] Dept. of Mat. Sci. and Engineering, National Chiao Tung University, Hsinchu 300, Taiwan
来源：
Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 1 A卷 / 8-11期
关键词：
Compendex;
D O I：
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摘要：
Annealing - Copper - Current density - Gold - Indium compounds - MESFET devices - Metallizing - Platinum - Semiconducting gallium arsenide - X ray diffraction analysis
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