Atmospheric pressure microwave plasma system with ring waveguide

被引：0

作者：

Liu, Liang ^{[1
]}

Zhang, Gui-Xin ^{[1
]}

Zhu, Zhi-Jie ^{[1
]}

Luo, Cheng-Mu ^{[1
]}

机构：

[1] Department of Electrical Engineering and Applied Electronic Technology, Tsinghua University, Beijing 100084, China

来源：

Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2007年 / 19卷 / 09期

关键词：

Argon - Atmospheric pressure - Electric fields - Helium - Microwaves - Waveguides;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Some scientists used waveguide as the cavity to produce a plasma jet, while large volume microwave plasma was relatively hard to get in atmospheric pressure. However, a few research institutes have already developed devices to generate large volume of atmospheric pressure microwave plasma, such as CYRANNUS and SLAN series, which can be widely applied. In this paper, present a microwave plasma system with ring waveguide to excite large volume of atmospheric pressure microwave plasma, plot curves on theoretical disruption electric field of some working gases, emulate the cavity through software, measure the power density to validate and show the appearance of microwave plasma. At present, large volume of argon and helium plasma have already been generated steadily by atmospheric pressure microwave plasma system. This research can build a theoretical basis of microwave plasma excitation under atmospheric pressure and will be useful in study of the device.

引用

页码：1501 / 1506

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