Influence of defects in SiOx thin films on their barrier properties

被引：0
|
作者：
Grüniger, A. [1 ]
Von Rohr, Ph. Rudolf [1 ]
机构：
[1] Swiss Fed. Inst. of Technol. Zurich, Institute of Process Engineering, CH-8092 Zurich, Switzerland
来源：
Thin Solid Films | / 1-2卷 / 308-312期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Composite materials - Crack initiation - Deposition - Diffusion - Laminates - Packaging materials - Plastic films - Silica
引用
收藏
相关论文
共 50 条
  • [31] Modification of organic coatings with thin plasma polymer films. influence on the barrier properties
    Serra, R
    Zheludkevich, ML
    Grundmeier, G
    Ferreira, MGS
    ADVANCED MATERIALS FORUM III, PTS 1 AND 2, 2006, 514-516 : 1401 - 1405
  • [32] Improving the gas barrier property of SiOx:C thin films deposited by RF magnetron sputtering
    Kuo, Chien-Cheng
    Li, Meng-Chi
    Liao, Shih-Fang
    Wei, Chin-Lun
    Wei, Hung-Sen
    Lee, Cheng-Chung
    SURFACE & COATINGS TECHNOLOGY, 2015, 279 : 161 - 165
  • [33] Influence of Acceptor Defects on the Structural, Optical and Electrical Properties of Sputtered NiO Thin Films
    Guillen, Cecilia
    Herrero, Jose
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2021, 218 (16):
  • [34] Phototransport Properties of CuInSe2 Thin Films: The Influence of Na and Planar Defects
    Zakay, N.
    Stange, H.
    Alpern, H.
    Greiner, D.
    Abou-Ras, D.
    Mainz, R.
    Balberg, I.
    Millo, O.
    Azulay, D.
    PHYSICAL REVIEW APPLIED, 2020, 14 (02)
  • [35] Influence of layer defects on the damping in ferroelectric thin films
    Wesselinowa, JM
    Michael, T
    Trimper, S
    Zabrocki, K
    PHYSICS LETTERS A, 2006, 348 (3-6) : 397 - 404
  • [36] Gas Barrier Properties of SiOx Films Deposited by RF Magnetron Co-sputtering
    Liu Zhuang
    Zhu Lin
    Lin Jing
    Sun Zhi-Hui
    MATERIALS AND DESIGN, PTS 1-3, 2011, 284-286 : 48 - +
  • [37] Influence of the gas phase on the water vapor barrier properties of SiOx films deposited from RF and dual-mode plasmas
    Sonnenfeld, Axel
    Bieder, Andrea
    von Rohr, Philipp Rudolf
    PLASMA PROCESSES AND POLYMERS, 2006, 3 (08) : 606 - 617
  • [38] Optical and magneto-optical properties of Co-SiOx thin films
    Fermento, R.
    Gonzalez-Diaz, J. B.
    Cebollada, A.
    Armelles, G.
    Diaz, M.
    Martinez, L.
    Roman, E.
    Huttel, Y.
    Ballesteros, C.
    JOURNAL OF NANOPARTICLE RESEARCH, 2011, 13 (06) : 2653 - 2659
  • [39] THERMAL RESISTIVITY OF SIOX THIN-FILMS
    STEELE, CB
    BEYNON, J
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1992, 11 (20) : 1338 - 1339
  • [40] INFLUENCE OF DEFECTS ON OPTICAL PROPERTIES OF METAL FILMS
    ABELES, F
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (04): : 736 - &
12345