Phase transformation kinetics of HfO2 polymorphs in ultra-thin region

被引：0
|
作者：
Nakajima, Y. [1 ]
Kita, K. [1 ]
Nishimura, T. [1 ]
Nagashio, K. [1 ]
Toriumi, A. [1 ]
机构：
[1] Department of Materials Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
来源：
Digest of Technical Papers - Symposium on VLSI Technology | 2011年
关键词：
Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
5984520
中图分类号：
学科分类号：
摘要：
Hafnium oxides - Phase transitions
引用
收藏
页码：84 / 85
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