Analysis and optimization of acoustic wave micro-resonators integrating piezoelectric zinc oxide layers

被引：0
|
作者：
机构：
[1] Mortada, O.
[2] Zahr, A.H.
[3] Orlianges, J.-C.
[4] Crunteanu, A.
[5] Chatras, M.
[6] Blondy, P.
来源：
| 1600年 / American Institute of Physics Inc.卷 / 121期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Tunable bulk acoustic wave resonators with the induced piezoelectric effect in a ferroelectric
    Vendik, I. B.
    PHYSICS OF THE SOLID STATE, 2009, 51 (08) : 1586 - 1589
  • [32] Tunable bulk acoustic wave resonators with the induced piezoelectric effect in a ferroelectric
    I. B. Vendik
    Physics of the Solid State, 2009, 51 : 1586 - 1589
  • [33] Wave propagation in piezoelectric layered structures of film bulk acoustic resonators
    Zhu, Feng
    Qian, Zheng-hua
    Wang, Bin
    ULTRASONICS, 2016, 67 : 105 - 111
  • [34] Bulk acoustic wave microwave composite resonators and filters with acoustic isolation of resonating layers
    Mansfeld, GD
    Alekseev, SG
    Kotelyanskii, IM
    1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2, 1998, : 963 - 966
  • [35] ACOUSTIC WAVE ATTENUATION IN INSULATING ZINC OXIDE
    HEMPHILL, RB
    CLAIBORNE, LT
    EINSPRUCH, NG
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1969, SU16 (01): : 27 - +
  • [36] Optimization of Zinc Oxide Thin Films for Silicon Surface Acoustic Wave Resonator Applications
    Sidek, Fatini
    Nordin, Anis Nurashikin
    Othman, Raihan
    ADVANCES IN ENVIRONMENTAL SCIENCE AND ENGINEERING, PTS 1-6, 2012, 518-523 : 3772 - 3779
  • [37] An elastic electrode model for wave propagation analysis in piezoelectric layered structures of film bulk acoustic resonators
    Feng Zhu
    Yuxing Zhang
    Bin Wang
    Zhenghua Qian
    ActaMechanicaSolidaSinica, 2017, 30 (03) : 263 - 270
  • [38] An elastic electrode model for wave propagation analysis in piezoelectric layered structures of film bulk acoustic resonators
    Feng Zhu
    Yuxing Zhang
    Bin Wang
    Zhenghua Qian
    Acta Mechanica Solida Sinica, 2017, 30 : 263 - 270
  • [39] An elastic electrode model for wave propagation analysis in piezoelectric layered structures of film bulk acoustic resonators
    Zhu, Feng
    Zhang, Yuxing
    Wang, Bin
    Qian, Zhenghua
    ACTA MECHANICA SOLIDA SINICA, 2017, 30 (03) : 263 - 270
  • [40] Electrode optimization for bulk acoustic wave resonators based on ZnO
    Francisco Perez-Sanchez, Gerardo
    Morales-Acevedo, Arturo
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2010, 174 (1-3): : 50 - 54
12345