Analysis and optimization of acoustic wave micro-resonators integrating piezoelectric zinc oxide layers

被引：0
|
作者：
机构：
[1] Mortada, O.
[2] Zahr, A.H.
[3] Orlianges, J.-C.
[4] Crunteanu, A.
[5] Chatras, M.
[6] Blondy, P.
来源：
| 1600年 / American Institute of Physics Inc.卷 / 121期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Analysis and optimization of acoustic wave micro-resonators integrating piezoelectric zinc oxide layers
    Mortada, O.
    Zahr, A. H.
    Orlianges, J. -C.
    Crunteanu, A.
    Chatras, M.
    Blondy, P.
    JOURNAL OF APPLIED PHYSICS, 2017, 121 (07)
  • [2] Analysis of the Quality Factor of Piezoelectric-Actuated Micro-Resonators
    Manzaneque, T.
    Hernando, J.
    Rodriguez-Aragon, L.
    Ababneh, A.
    Seidel, H.
    Schmid, U.
    Sanchez-Rojas, J. L.
    SMART SENSORS, ACTUATORS, AND MEMS IV, 2009, 7362
  • [3] Elimination of Spurious Modes in Zinc Oxide Micro-Resonators by Optimizing Structure Parameters
    Ossama, Mortada
    Matthieu, Chatras
    Halim, Zahr Abdel
    Pierre, Blondy
    Aurelian, Crunteanu
    Orlianges, Jean-Christophe
    2016 EUROPEAN FREQUENCY AND TIME FORUM (EFTF), 2016,
  • [4] Contour mode Piezoelectric Ring Micro-resonators on Si for Series Resonant Converters
    Imtiaz, Abusaleh M.
    Khan, Faisal H.
    Walling, Jeffrey S.
    2014 TWENTY-NINTH ANNUAL IEEE APPLIED POWER ELECTRONICS CONFERENCE AND EXPOSITION (APEC), 2014, : 2593 - +
  • [5] ZINC-OXIDE-ON-SILICON SURFACE ACOUSTIC-WAVE RESONATORS
    MARTIN, SJ
    GUNSHOR, RL
    PIERRET, RF
    APPLIED PHYSICS LETTERS, 1980, 37 (08) : 700 - 701
  • [6] Application of acoustic micro-resonators in quartz-enhanced photoacoustic spectroscopy for trace gas analysis
    Zheng, Huadan
    Dong, Lei
    Wu, Hongpeng
    Yin, Xukun
    Xiao, Liantuan
    Jia, Suotang
    Curl, Robert F.
    Tittel, Frank K.
    CHEMICAL PHYSICS LETTERS, 2018, 691 : 462 - 472
  • [7] Efficient parametric amplification in micro-resonators with integrated piezoelectric actuation and sensing capabilities
    Thomas, O.
    Mathieu, F.
    Mansfield, W.
    Huang, C.
    Trolier-McKinstry, S.
    Nicu, L.
    APPLIED PHYSICS LETTERS, 2013, 102 (16)
  • [8] Enhanced piezoelectric properties of aluminium doped zinc oxide thin film for surface acoustic wave resonators on a CMOS platform
    Ralib, Aliza Aini Md
    Mortada, Ossama
    Orlianges, Jean Christophe
    Crunteanu, Aurelian
    Chatras, Matthieu
    Nordin, Anis Nurashikin
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2017, 28 (12) : 9132 - 9138
  • [9] Enhanced piezoelectric properties of aluminium doped zinc oxide thin film for surface acoustic wave resonators on a CMOS platform
    Aliza Aini Md Ralib
    Ossama Mortada
    Jean Christophe Orlianges
    Aurelian Crunteanu
    Matthieu Chatras
    Anis Nurashikin Nordin
    Journal of Materials Science: Materials in Electronics, 2017, 28 : 9132 - 9138
  • [10] SAIL-SHAPED PIEZOELECTRIC MICRO-RESONATORS FOR HIGH RESOLUTION GAS FLOWMETRY
    Ramezany, A.
    Mahdavi, M.
    Moses, A.
    Pourkamali, S.
    2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015, : 2252 - 2255
12345