A MEMS piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism

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[1] Wang, Yixiang
[2] Ding, Hong
[3] Le, Xianhao
[4] Xie, Jin
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Xie, Jin (xiejin@zju.edu.cn) | 1600年 / Institute of Electrical and Electronics Engineers Inc., United States卷
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