Structure and high temperature oxidation properties of magnetron sputtered CrSiN coating

被引:0
|
作者
Xu, Xiang-Min [1 ]
Zhang, Hao [1 ]
Shang, Jin [1 ]
Luo, Chen-Gang [1 ]
Duo, Shu-Wang [1 ]
机构
[1] Jiangxi Key Laboratory of Surface Engineering, Jiangxi Science and Technology Normal University, Nanchang, China
关键词
Compendex;
D O I
暂无
中图分类号
学科分类号
摘要
Magnetron sputtering
引用
收藏
页码:155 / 158
相关论文
共 50 条
  • [31] Impact of structure on mechanical properties and oxidation behavior of magnetron sputtered cubic and hexagonal MoNx thin films
    Tillmann, Wolfgang
    Kokalj, David
    Stangier, Dominic
    APPLIED SURFACE SCIENCE ADVANCES, 2021, 5
  • [32] XPS study on interfacial structure of RF magnetron sputtered titanium coating and ceramics
    Zhang, Hanlin
    Liu, Hanxing
    Wang, Dianfen
    Ouyang, Shixi
    Yuan, Runzhang
    Ren, Hailan
    Fuhe Cailiao Xuebao/Acta Materiae Compositae Sinica, 1997, 14 (02): : 40 - 44
  • [33] Microstructure, mechanical properties and oxidation behaviors of magnetron sputtered NbNx coatings
    Qi, Zhengbing
    Wu, Zhengtao
    Zhang, Dongfang
    Zuo, Juan
    Wang, Zhoucheng
    JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 675 : 22 - 30
  • [34] Microstructure, mechanical properties and oxidation behaviors of magnetron sputtered NbNx coatings
    Qi, Zhengbing (zbqi@xmut.edu.cn), 1600, Elsevier Ltd (675):
  • [35] Oxidation behavior of sputtered microcrystalline coating of superalloy K17F at high temperature
    Lou, HY
    Tang, YJ
    Sun, XF
    Guan, HR
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1996, 207 (01): : 121 - 128
  • [36] TOPOGRAPHY STUDIES OF A MAGNETRON REACTIVE SPUTTERED COATING
    Stefanescu, Ileana
    Ciuca, Ion
    UNIVERSITY POLITEHNICA OF BUCHAREST SCIENTIFIC BULLETIN SERIES B-CHEMISTRY AND MATERIALS SCIENCE, 2013, 75 (03): : 147 - 152
  • [37] HIGH-TEMPERATURE ELECTRICAL INSULATING PROPERTIES OF RF MAGNETRON SPUTTERED ALUMINA COATINGS ON COPPER
    VUORISTO, P
    MANTYLA, T
    KETTUNEN, P
    PLASMA SURFACE ENGINEERING, VOLS 1 AND 2, 1989, : 609 - 616
  • [38] Study on properties of closed field unbalanced magnetron sputtered CrTiAlN/MoST coating
    School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China
    Cailiao Rechuli Xuebao, 2007, SUPPL. (263-266): : 263 - 266
  • [39] STRUCTURE AND PROPERTIES OF RF MAGNETRON SPUTTERED W-FILMS
    HUGON, MC
    ARENA, C
    AGIUS, B
    FROMENT, M
    VARNIERE, F
    VIGNAUD, C
    MICROSCOPY MICROANALYSIS MICROSTRUCTURES, 1990, 1 (03): : 175 - 187
  • [40] Structure and properties of magnetron-sputtered manganese ferrite films
    Fietzke, Fred
    Zywitzki, Olaf
    THIN SOLID FILMS, 2017, 644 : 138 - 145