Design and analysis of a 3-PPP compliant parallel micro-positioning stage

被引：0
|
作者：
Wang B. [1 ]
Meng G. [1 ]
Lin M. [1 ]
Li W. [2 ]
Cao Y. [1 ,3 ]
机构：
[1] School of Mechanical Engineering, Jiangnan University, Wuxi
[2] Suzhou Vocational Institute of Industrial Technology, Suzhou
[3] Jiangsu Key Laboratory of Advanced Food Manufacturing Equipment and Technology, Wuxi
来源：
Beijing Hangkong Hangtian Daxue Xuebao/Journal of Beijing University of Aeronautics and Astronautics | 2020年 / 46卷 / 04期
关键词：
Compliance matrix; Compliant parallel micro-positioning stage (CPMS); Coupling error; Finite element simulation; Natural frequency;
D O I：
10.13700/j.bh.1001-5965.2019.0286
中图分类号：
学科分类号：
摘要：
The structure layouts of the existing spatial translational compliant parallel micro-positioning stages are not compact, and the parasitic motion of each kinematic joint accumulates during multi-axis actuation, which leads to the augment of cross-axis coupling error. In order to solve these problems, first, a distributed-compliance 3-PPP spatial translational compliant parallel micro-positioning stage (CPMS) based on compliant sheet was designed. Secondly, the stage volume was reduced, and the parasitic motion accumulation phenomenon of kinematic joints in each limb was eliminated by the way of structure optimization. Then, the theoretical model of input stiffness was deduced through compliance matrix method. The validity of the theoretical model was proved by finite element simulation. Besides, the natural frequency of the CPMS was calculated, and the relationship between natural frequency of the CPMS and size parameters of compliant sheet was explored. Finally, comparative analysis of the CPMS before and after structure optimization was conducted by finite element simulation. The results show that the volume of the CPMS is reduced by 67% after structure optimization, and the CPMS has better kinematic decoupling characteristic and input output consistency in both single-axis and multi-axis actuation. © 2020, Editorial Board of JBUAA. All right reserved.
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页码：798 / 807
页数：9
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