Laser forming of LTCC ceramics for hot-plate gas sensors

被引：0
|
作者：
Kita, Jaroslaw [1 ]
Rettig, Frank [1 ]
Moos, Ralf [1 ]
Drüe, Karl-Heinz [2 ]
Thust, Heiko [2 ]
机构：
[1] University of Bayreuth, Department of Functional Materials, Universitätsstr. 30, D-95440 Bayreuth, Germany
[2] Technical University of Ilmenau, Microperipheric Group, Max-Planck-Ring 14, D-98693 Ilmenau, Germany
来源：
Journal of Microelectronics and Electronic Packaging | 2005年 / 2卷 / 01期
关键词：
D O I：
10.4071/1551-4897-2.1.14
中图分类号：
学科分类号：
摘要：
7
引用
收藏
页码：14 / 18
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