Laser forming of LTCC ceramics for hot-plate gas sensors

被引：0
|
作者：
Kita, Jaroslaw [1 ]
Rettig, Frank [1 ]
Moos, Ralf [1 ]
Drüe, Karl-Heinz [2 ]
Thust, Heiko [2 ]
机构：
[1] University of Bayreuth, Department of Functional Materials, Universitätsstr. 30, D-95440 Bayreuth, Germany
[2] Technical University of Ilmenau, Microperipheric Group, Max-Planck-Ring 14, D-98693 Ilmenau, Germany
来源：
Journal of Microelectronics and Electronic Packaging | 2005年 / 2卷 / 01期
关键词：
D O I：
10.4071/1551-4897-2.1.14
中图分类号：
学科分类号：
摘要：
7
引用
收藏
页码：14 / 18
相关论文
共 50 条
  • [1] Hot plate gas sensors -: Are ceramics better
    Kita, J
    Rettig, F
    Moos, R
    Drüe, KH
    Thust, H
    INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY, 2005, 2 (05) : 383 - 389
  • [2] LTCC hot plates for gas sensors
    Rettig, F
    Moos, R
    SENSORS AND MEASURING SYSTEMS 2004, 2004, 1829 : 749 - 752
  • [3] Investigation on the sensitivity of hot-plate gas flow sensors in very low flow regime
    Bruschi, P
    Navarrini, D
    Piotto, M
    SENSORS AND MICROSYSTEMS, PROCEEDINGS, 2004, : 437 - 442
  • [4] LABORATORY HOT-PLATE
    不详
    JOURNAL OF SCIENTIFIC INSTRUMENTS, 1945, 22 (03): : 56 - 56
  • [5] The dish on Hot-Plate welding
    Assembly, 2007, 50 (09): : 38 - 43
  • [6] Experimental Study on Hot-Plate Cooling with CO2 Gas
    Bae, Hyung Sup
    Park, Dong Hyun
    Lee, Ho Sang
    TRANSACTIONS OF THE KOREAN SOCIETY OF MECHANICAL ENGINEERS A, 2021, 45 (06) : 489 - 495
  • [7] Should the Hot-Plate Test Be Reincarnated?
    Yezierski, Robert P.
    Vierck, Charles J.
    JOURNAL OF PAIN, 2011, 12 (08): : 936 - 937
  • [8] A Micro-machined Ceramic Hot-plate for Gas Sensor Applications
    Xue, Yanbing
    Tang, Zhenan
    MACHINERY, MATERIALS SCIENCE AND ENGINEERING APPLICATIONS, PTS 1 AND 2, 2011, 228-229 : 558 - +
  • [9] CONTROL OF HOT-PLATE TEMPERATURE PROFILES
    HENDERSO.DB
    WITTMAN, FE
    DREICER, H
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1968, 13 (11): : 1557 - &
  • [10] INVESTIGATION OF HOT-PLATE ANEMOMETER FOR MEASURING FLOWRATE OF DUST-LADEN GAS
    LELCHUK, VL
    ETKIN, VB
    THERMAL ENGINEERING, 1973, 20 (11) : 45 - 48
12345