Insight into temperature impact of Ta filaments on high-growth-rate diamond (100) films by hot-filament chemical vapor deposition

被引：0
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作者：
Takamori, Yue [1 ]
Nagai, Masatsugu [1 ]
Tabakoya, Taira [1 ]
Nakamura, Yuto [1 ]
Yamasaki, Satoshi [2 ]
Nebel, Christoph E. [2 ,3 ]
Zhang, Xufang [1 ,2 ]
Matsumoto, Tsubasa [1 ,2 ]
Inokuma, Takao [1 ]
Tokuda, Norio [1 ,2 ]
机构：
[1] Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa,Ishikawa,920-1192, Japan
[2] Nanomaterials Research Institute, Kanazawa University, Kanazawa,Ishikawa,920-1192, Japan
[3] Diamond and Carbon Applications, Bürgerwehrstrasse 1, Freiburg,79102, Germany
来源：
Diamond and Related Materials | 2021年 / 118卷
关键词：
Compendex;
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摘要：
Activation energy - Growth rate - Methane - Temperature distribution - Chemical vapor deposition - Surface reactions - Arrhenius plots
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