Insight into temperature impact of Ta filaments on high-growth-rate diamond (100) films by hot-filament chemical vapor deposition

被引：0
|
作者：
Takamori, Yue [1 ]
Nagai, Masatsugu [1 ]
Tabakoya, Taira [1 ]
Nakamura, Yuto [1 ]
Yamasaki, Satoshi [2 ]
Nebel, Christoph E. [2 ,3 ]
Zhang, Xufang [1 ,2 ]
Matsumoto, Tsubasa [1 ,2 ]
Inokuma, Takao [1 ]
Tokuda, Norio [1 ,2 ]
机构：
[1] Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa,Ishikawa,920-1192, Japan
[2] Nanomaterials Research Institute, Kanazawa University, Kanazawa,Ishikawa,920-1192, Japan
[3] Diamond and Carbon Applications, Bürgerwehrstrasse 1, Freiburg,79102, Germany
来源：
Diamond and Related Materials | 2021年 / 118卷
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Activation energy - Growth rate - Methane - Temperature distribution - Chemical vapor deposition - Surface reactions - Arrhenius plots
引用
收藏
相关论文
共 50 条
  • [1] Insight into temperature impact of Ta filaments on high-growth-rate diamond (100) films by hot-filament chemical vapor deposition
    Takamori, Yue
    Nagai, Masatsugu
    Tabakoya, Taira
    Nakamura, Yuto
    Yamasaki, Satoshi
    Nebel, Christoph E.
    Zhang, Xufang
    Matsumoto, Tsubasa
    Inokuma, Takao
    Tokuda, Norio
    DIAMOND AND RELATED MATERIALS, 2021, 118
  • [2] High-Rate Growth of Single-Crystalline Diamond (100) Films by Hot-Filament Chemical Vapor Deposition with Tantalum Filaments at 3000 °C
    Tabakoya, Taira
    Kanada, Shohei
    Wakui, Yusuke
    Takamori, Yue
    Yamada, Tatsuki
    Nagai, Masatsugu
    Kojima, Yoshiyasu
    Ariyada, Osamu
    Yamasaki, Satoshi
    Nebel, Christoph E.
    Matsumoto, Tsubasa
    Inokuma, Takao
    Tokuda, Norio
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2019, 216 (21):
  • [3] Growth of diamond films on crystalline silicon by hot-filament chemical vapor deposition
    Baidakova, MV
    Vul', AY
    Golubev, VG
    Grudinkin, SA
    Melekhin, VG
    Feoktistov, NA
    Krüger, A
    SEMICONDUCTORS, 2002, 36 (06) : 615 - 620
  • [4] Growth of diamond films on crystalline silicon by hot-filament chemical vapor deposition
    M. V. Baidakova
    A. Ya. Vul’
    V. G. Golubev
    S. A. Grudinkin
    V. G. Melekhin
    N. A. Feoktistov
    A. Krüger
    Semiconductors, 2002, 36 : 615 - 620
  • [5] Growth of nanocrystalline diamond films on quartz by hot-filament chemical vapor deposition
    Tsai, H. Y.
    Yu, K. H.
    Yeh, M. K.
    JOURNAL OF CERAMIC PROCESSING RESEARCH, 2015, 16 (05): : 584 - 590
  • [6] THE EFFECT OF FILAMENT TEMPERATURE ON THE GROWTH OF DIAMOND USING HOT-FILAMENT CHEMICAL-VAPOR-DEPOSITION
    VENTER, A
    NEETHLING, JH
    DIAMOND AND RELATED MATERIALS, 1994, 3 (1-2) : 168 - 172
  • [7] Controllable Growth of Nanocrystalline Diamond Films by Hot-Filament Chemical Vapor Deposition Method
    Li, Yunlong
    Li, Junjie
    Wang, Qiang
    Yang, Yang
    Gu, Changzhi
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2009, 9 (02) : 1062 - 1065
  • [8] Lonsdaleite diamond growth on reconstructed Si (100) by hot-filament chemical vapor deposition (HFCVD)
    Van Chiem, C
    Seo, HK
    Ansari, SG
    Kim, GS
    Seo, JM
    Shin, HS
    KOREAN JOURNAL OF CHEMICAL ENGINEERING, 2003, 20 (06) : 1154 - 1157
  • [9] Lonsdaleite diamond growth on reconstructed Si (100) by hot-filament chemical vapor deposition (HFCVD)
    Chu Van Chiem
    Hyung-Kee Seo
    Shafeeque G. Ansari
    Gil-Sung Kim
    Jae Myung Seo
    Hyung-Shik Shin
    Korean Journal of Chemical Engineering, 2003, 20 : 1154 - 1157
  • [10] ORIENTED GROWTH OF A DIAMOND FILM ON SI(100) BY HOT-FILAMENT CHEMICAL-VAPOR-DEPOSITION
    ZHANG, XX
    SHI, TS
    WANG, JX
    ZHANG, XK
    JOURNAL OF CRYSTAL GROWTH, 1995, 155 (1-2) : 66 - 69
12345